Semiconductor Industry Applications

Vitrek offers a variety of products supporting the semiconductor industry for quality control of the fabrication process as well as testing and verification of semiconductor devices' operational performance as well as supporting the performance of capital equipment use in the semiconductor manufacturing process.  Some Vitrek product applications include: Semiconductor Wafer Metrology [...]

2024-06-19T12:01:31-07:00

Capacitance Sensors Facilitate 3D IC Construction

Capacitance Sensors Facilitate 3D IC Construction Semiconductor, Research & Development 3D IC Construction Distance, Positioning, Displacement Description [Application Note 70518] To boost device performance, today's semiconductor and microelectronics manufacturers are building three-dimensional integrated circuits featuring vertically-stacked silicon wafers and dies. The rationale is simple. Exploiting [...]

Thickness Gauge Measurement With Conductive Wafers and Thin Films

Thickness Gauge Measurement With Conductive Wafers and Thin Films Consumer Electronics Electronics Parts Profiling Thickness Description Using MTI's capacitive thickness gauge Proforma 300i with conductive wafers and thin films G = (a+b+t1+t2 ) Where G is the fixed gap between two probes When making [...]

Semiconductor Wafer Lapping and Displacement Measurement

Semiconductor Wafer Lapping and Displacement Measurement Semiconductor Semiconductor Wafer Manufacturing Displacement Description Semiconductor Wafer Lapping and Displacement Measurement This application note explains how MTI's Accumeasure technology was used with a lapping machine to measure displacement (wafer material removal) and determine the new semiconductor wafer thickness. [...]

MTI’s Accumeasure HD Amplifier vs. SmarAct’s PicoScale Interferometer

MTI's Accumeasure HD Amplifier vs. SmarAct's PicoScale Interferometer Research & Development Piezoceramic, 1-3 Pzt / Polymer Composite And Pvdf Film Amplitude Description This application note compares MTI's Accumeasure HD amplifier to SmarAct's Picoscale interferometer in terms of resolution and accuracy for very small displacement measurements. [...]

Connecting Encoders to MTI’s Digital Accumeasure

Connecting Encoders to MTI's Digital Accumeasure MTI's Digital Accumeasure D has the ability to accept one or two digital quadrature encoders. The encoders can be linear slide-type or rotary. Digital encoders allow for tracking the position of capacitive probes such that you can synchronize a probe's position with the probe's [...]

Thickness and TTV of Semiconducting Wafers

Thickness and TTV of Semiconducting Wafers Semiconductor Thickness And TTV Of Semiconducting Wafers Thickness Description Introduction:  Silicon wafers are ordinarily highly conductive and easy to measure with standard capacitive displacement sensors (See MTI’s Proforma 300i). Measuring the thickness of GaAs wafers that have high bulk [...]

Lithography Optics Position Focus

Lithography Optics Position Focus Semiconductor Lithography Optics Position Focus Positioning Description One specific area where capacitance systems excel is high resolution focusing of complex lens systems such as those found in atomic force microscopes, vision inspection machines and photolithography tools. In a multi-million dollar photolithography [...]

Push-Pull Capacitance Sensor Measures Ungrounded Targets

Push-Pull Capacitance Sensor Measures Ungrounded Targets Solar, Semiconductor Measurement of Ungrounded Targets Thickness, Metrology Description [Application Note 50318] Today’s semiconductor and solar industries drive the demand for thinner wafers to conserve silicon and fulfill new IC applications. To meet this demand, wafer fabricators seek greater [...]

Wafer QA/QC After Slicing And Polishing

Wafer QA/QC After Slicing And Polishing Semiconductor Wafer Qa/Qc After Slicing And Polishing Surface Description Introduction: When wafers are sliced up with wire saws, they are measured to make sure they are within the specified thickness, with minimal bow, warp, and TTV. After initial measurement, they [...]

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