Company | Model | Resolution nm RMS1 | Linearity± | Range2 | Frequency response | Stability ppm/C |
MTI | Accumeasure 9000 | 0.018 | 0.02 | 0.012-15 mm | 0-5 kHz | 60 |
Capacitec | 520 | 0.0127 | 0.05 | 0.5-12.7 mm | 0-16 kHz | 110 |
1 Resolution is in nanometers at 1Hz bandwidth, 1 meter coax, 1mm sensor diameter, 25µm range.
2 Min range to Max range of probes available in mm
2 Min range to Max range of probes available in mm