CompanyModelResolution
nm RMS1
Linearity±Range2Frequency responseStability
ppm/C
MTIAccumeasure 90000.0180.020.012-15 mm0-5 kHz60
Capacitec5200.01270.050.5-12.7 mm0-16 kHz110
1 Resolution is in nanometers  at 1Hz bandwidth, 1 meter coax, 1mm sensor diameter, 25µm range.
2 Min range to  Max range of probes available in mm
ACCORDING TO PUBLISHED SPECS, THE ACCUMEASURE 500 RACK INDIVIDUAL BOARDS HAVE 2.5X BETTER LINEARITY THAN CAPACITEC 520 INDIVIDUAL BOARDS.  THE ACCUMEASURE 500 HAS BETTER THERMAL STABILITY THAN THE CAPACITEC 520 INDIVIDUAL BOARDS BY ALMOST A FACTOR OF 2X.