Custom High Accuracy OEM solutions for micro-positioning and feedback control applications
The Accumeasure MicroCap is a compact, custom designed, OEM capacitance board for high-precision non-contact displacement, thickness and gap measurement. The AccumeasureTM Microcap capacitance board allows rapid deployment for OEMs that require custom measurement solutions for micro-positioning, thermal correction, focusing and closed loop control applications.
About Accumeasure OEM Boards
The Accumeasure MicroCap is a compact, custom designed, OEM capacitance board for high-precision non-contact displacement, thickness and gap measurement. The AccumeasureTM Microcap capacitance board allows rapid deployment for OEMs that require custom measurement solutions for micro-positioning, thermal correction, focusing and closed loop control applications. It provides exceptional value and offers sub-nanometer resolution, extreme stability, exceptional repeatability, and fast response time, making it ideal for micro-positioning, thermal correction, focusing and closed loop control applications. The MicroCap utilizes MTI Instrument’s latest capacitance amplifier design, backed by over 60 years of product line history and thousands of installations worldwide.
| MicroCap and AS-563-PA | AS-562-PA | |
| For Grounded Targets Use Single-ended Probes |
For Ungrounded Targets Use Push/Pull Probes |
- On Board offset and gain adjustments
- Requires +/- 15VDC Power Supply
- Customizable for large multi-channel applications
- Boards can be synchronized
| Industry | Measurement Type | Applications |
|---|---|---|
| Semiconductor | Positioning | Photolithography using capacitance sensors |
| Semiconductor | Positioning | Lithography Optics position focus |
| Semiconductor | Level | Wire bonding |
| Semiconductor | Metrology | Wafer Measurement – Ungrounded |
| Semiconductor | Surface | Wafer Thickness, Bow, Warp and TTV |
| Semiconductor | Surface | Wafer QA/QC after slicing and polishing |
| Consumer Electronics | Positioning | Piezo Stage |
| Automotive | Distance | Spindle Runout |
| Automotive | Surface | Grinding Process |
| Automotive | Level | Oil Film |
| Automotive | Surface | Brake rotors thickness variation |
| Automotive | Tolerances | Windshield Manufacturing |
| Semiconductor | Displacement | LED substrate sapphire thickness |
| Product Info | Technical Specifications | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| P/N | Model | Measurement Range | Accuracy | Min. Range | Stand-Off | Resolution | Type | Frequency Response | Request Info | |||
| 8000-4303-001 | Grounded Target Probe Module: AS-563-PA | Select Probes | 0.02% FSR RMS | 25µm/ 1mil | 25mm (0.98″) | 0.000075%/ √Hz FSR RMS | Plug-in ModuleOEM Board | Filters from 10Hz to 5kHz | Request Information on Grounded Target Probe Module: AS-563-PA | |||
| 8000-4304-001 | Ungrounded Target Probe Module: AS-562-PA | Select Probes | 0.02% FSR RMS | 25µm/ 1mil | 25mm (0.98″) | 0.000075%/ √Hz FSR RMS | Plug-in ModuleOEM Board | Filters from 10Hz to 5kHz | Request Information on Ungrounded Target Probe Module: AS-562-PA | |||
| 8000-6508 | AS-Microcap OEM amplifier board | Select Probes | 0.02% FSR RMS | 25µm/ 1mil | 25mm (0.98″) | 0.000075%/ √Hz FSR RMS | OEM board | Request Information on AS-Microcap OEM amplifier board | ||||
| P/N | IMAGE | MODEL | PRODUCT DESCRIPTION |
|---|---|---|---|
| 8000-6893-410 |  |
SMA(F) to MCX(M) | 1 meter |
| 8000-6893-424 | |
SMA(F) to MCX(M) | 2.5 meters |
| 8000-6893-430 | |
SMA(F) to MCX(M) | 3 meters |
| 8000-6893-450 | |
SMA(F) to MCX(M) | 5 meters |
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