Digital Accumeasure Gen 3

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The Accumeasure D capacitance displacement sensor series amplifier is a revolutionary design that uses the latest technology to convert a highly reliable capacitive electric field measurement (displacement) directly into a highly precise 24 bit digital reading to accurately measure position, thickness, motion and vibration.

About Digital Accumeasure Gen 3

Our new capacitance amplifier converts the probe capacitance directly to target gap (distance). This direct conversion approach eliminates errors that traditional analog amplifiers have due to analog filtering, linearization, range extension and the summing of channels to obtain thickness or step measurements.  With the Accumeasure D series, filter frequency response, sample rate, linearization and probe range are all digitally controlled. This ensures the most accurate data capture, lossless processing and the freedom from having to purchase additional acquisition hardware.

The standard feature quadrature encoder input, provides probe positional information simultaneously with its displacement signal by synchronizing displacement measurements to the probe position to provide accurate surface profiles of various conducting and semi-conducting targets.  MTI’s Digital Accumeasure capacitance displacement sensor amplifiers comes standard with 24 bit USB/Ethernet digital output. The analog output model includes the analog output in addition to the standard digital output. Both may be used simultaneously. This is ideal for closed loop applications or integration into systems that require analog.

  • True Direct Digital Capacitive Displacement Sensor
  • Up to 0.01% FSR Linearity
  • Sub-nanometer Resolution
  • Built-in Quadrature Input
  • 20kS/sec. on all channels
  • No need for Analog-to-Digital Converter
  • 100% digital linearization of the gap response
  • Lossless 24 bit processing
  • Interface with NI LabVIEW™
  • Adjustable output data rate
  • Digital phasing of the probes to permit measuring floating targets
  • Digitally controlled Range extension, Filtering and signal averaging
  • USB and Ethernet Output
  • Analog Output
  • No additional acquisition hardware required
Product Info Technical Specifications
P/N Model Accuracy Stand-Off Resolution Interface Type Frequency Response Request Info
8000-6454-100 DIGITAL D100 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) USB 1-channel (SE) User Selectable 50Hz to 5kHz Request Information on DIGITAL D100 QUAD
8000-6454-110 DIGITAL D110 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) Analog and USB 1-channel (SE) User Selectable 50Hz to 5kHz Request Information on DIGITAL D110 QUAD
8000-6454-200 DIGITAL D200 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) USB 2-channel (SE) User Selectable 50Hz to 5kHz Request Information on DIGITAL D200 QUAD
8000-6454-201 DIGITAL D201 QUAD 0.01% FSR Select PP Probes up to sub-nanometer (select probes for specifications) USB 2-channel (PP) User Selectable 50Hz to 5kHz Request Information on DIGITAL D201 QUAD
8000-6454-202 DIGITAL D202 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) USB 2-channel (180) User Selectable 50Hz to 5kHz Request Information on DIGITAL D202 QUAD
8000-6454-210 DIGITAL D210 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) Analog and USB 2-channel (SE) User Selectable 50Hz to 5kHz Request Information on DIGITAL D210 QUAD
8000-6454-211 DIGITAL D211 QUAD 0.01% FSR Select PP Probes up to sub-nanometer (select probes for specifications) Analog and USB 2-channel (PP) User Selectable 50Hz to 5kHz Request Information on DIGITAL D211 QUAD
8000-6454-212 DIGITAL D212 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) Analog and USB 2-channel (180) User Selectable 50Hz to 5kHz Request Information on DIGITAL D212 QUAD
8000-6454-300 DIGITAL D300 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) USB 3-channel (SE) User Selectable 50Hz to 5kHz Request Information on DIGITAL D300 QUAD
8000-6454-310 DIGITAL D310 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) Analog and USB 3-channel (SE) User Selectable 50Hz to 5kHz Request Information on DIGITAL D310 QUAD
8000-6454-400 DIGITAL D400 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) USB 4-channel (SE) User Selectable 50Hz to 5kHz Request Information on DIGITAL D400 QUAD
8000-6454-401 DIGITAL D401 QUAD 0.01% FSR Select PP Probes up to sub-nanometer (select probes for specifications) USB 4-channel (PP) User Selectable 50Hz to 5kHz Request Information on DIGITAL D401 QUAD
8000-6454-402 DIGITAL D402 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) USB 4-channel (180) User Selectable 50Hz to 5kHz Request Information on DIGITAL D402 QUAD
8000-6454-410 DIGITAL D410 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) Analog and USB 4-channel (SE) User Selectable 50Hz to 5kHz Request Information on DIGITAL D410 QUAD
8000-6454-411 DIGITAL D411 QUAD 0.01% FSR Select PP Probes up to sub-nanometer (select probes for specifications) Analog and USB 4-channel (PP) User Selectable 50Hz to 5kHz Request Information on DIGITAL D411 QUAD
8000-6454-412 DIGITAL D412 QUAD 0.01% FSR Select Capacitance Probes up to sub-nanometer (select probes for specifications) Analog and USB 4-channel (180) User Selectable 50Hz to 5kHz Request Information on DIGITAL D412 QUAD
Industry Measurement Type Applications
Semiconductor Positioning Photolithography using capacitance sensors
Semiconductor Positioning Lithography Optics position focus
Semiconductor Thickness LED substrate thickness
Semiconductor Thickness GaAs substrate thickness measurement
Semiconductor Metrology Wafer Measurement – Ungrounded
Solar Metrology Wafer Bow and Warp
Consumer Electronics Thickness Glass Thickness
Consumer Electronics Positioning Piezo Stage
Automotive  Distance Spindle Run out
 Automotive  Level Oil Film
Automotive Surface Brake rotors thickness variation
Automotive Tolerances Windshield Manufacturing
Power Generation Tolerances Tolerances of Armature Gaps
Research & Development Presence/Absence In-situ particle detection
Automotive Surface Brake Rotors
Semiconductor  Thickness  Thickness and TTV of semiconducting wafers

Introduction to the Digital Accumeasure D400

Basic Setup

Measuring various materials

Measuring HP Printer Laser Head

Copper Foil Step Height Measurement

Push Pull Capacitance Probes for Differential Measurement

How do I determine the correct probe sensors for my application?

MTI’s New Non-Contact Hybrid Probe

P/N Image Model Product Description
8000-6925 power supply accessory Power Supply DIN mount (includes power cord and 24VDC harness)
8000-6887  ethernet cable Ethernet Cable RJ45 to RJ45, 2.1 meter (7ft)
8000-6929 USB interface cable USB Interface Cable Micro USB-Male to USB Micro USB-Male, 1 meter (3.1ft)
8000-6882  DIN rail section accessory DIN Rail Section 250mm (10inch) din rail for wall mounting power supply
8000-6889  T connector T-Connector Synchronization adapter to daisy chain multiple systems
8000-6888  sync cable Sync Cable Cable to sync multiple systems (SMA-M to SMA-M)
7500-6811  fixture 7500 6811 Fixture Non-conductIve Material Fixture

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